JPH01120035U - - Google Patents
Info
- Publication number
- JPH01120035U JPH01120035U JP1316988U JP1316988U JPH01120035U JP H01120035 U JPH01120035 U JP H01120035U JP 1316988 U JP1316988 U JP 1316988U JP 1316988 U JP1316988 U JP 1316988U JP H01120035 U JPH01120035 U JP H01120035U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- ultra
- air
- control system
- airflow control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004378 air conditioning Methods 0.000 claims 2
- 238000004080 punching Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1316988U JPH01120035U (en]) | 1988-02-02 | 1988-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1316988U JPH01120035U (en]) | 1988-02-02 | 1988-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01120035U true JPH01120035U (en]) | 1989-08-15 |
Family
ID=31223262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1316988U Pending JPH01120035U (en]) | 1988-02-02 | 1988-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01120035U (en]) |
-
1988
- 1988-02-02 JP JP1316988U patent/JPH01120035U/ja active Pending